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Beam shutters driven by MECOS technology

Fast-spinning beam shutters for a wide range of applications

High-speed beam choppers are used in a variety of applications to modulate beams of different types and synchronize them with a higher-level process. Application areas include X-ray and electron beams, as well as particle beams such as neutron beams in medical applications.

High-speed beam choppers equipped with magnetic bearings can reach rotational speeds of up to 100,000 rpm while maintaining extremely high speed accuracy.

 

Features and Benefits

  • Very high rotation speeds
  • Highest rotation speed accuracy
  • Variable duty cycle
  • Variable beam diameter
  • Minimal heating of the process medium
  • No contamination of the process
  • Maintenance-free

 

Wide range of application areas:

  • Wavelengths: UV, EUV, X-ray, etc.
  • Particle beams (neutrons, protons, etc.)
  • Ultra-high vacuum (<10-1 mbar)

High-speed shutters for the semiconductor industry

MECOS technology is integrated at the core of mask inspection and repair systems in the semiconductor industry. EUV lithography requires the highest levels of accuracy and strictly contamination-free processes.

Mecos - Magnetlagertechnologie - Magnetlager - Kompressoren & Expander - Elektromotoren - Kryogene Kreisläufe - Schwungräder - Strahlen-Shutter - Turbo-Gebläse - Messstände - Prüfstände - Vakuum-Pumpen - Steuerungs-Systeme - Sensoren - Maschinenbau - Ingenieurwesen - Magnetic Bearing Technology - Magnetic Bearing - Sensor Arrays - Electronical Control Systems - Compressors & Expanders - Electric Motors & HSDD - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measuring Rigs - Test Rigs - Vacuum Pumps - Mechanical Engineering – Engineering - Mecos - Magnetic Bearing Technology - Magnetic Bearings - Compressors & Expanders - Electric Motors - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measurement Rigs - Test Rigs - Vacuum Pumps - Control Systems - Sensors - Mechanical Engineering - Engineering - Magnetic Bearing Technology - Magnetic Bearing - Sensor Arrays - Electronical Control Systems - Compressors & Expanders - Electric Motors & HSDD - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measuring Rigs - Test Rigs - Vacuum Pumps - Mechanical Engineering - Engineering - Mecos - Magnetic Bearing Technology - Magnetic Bearings - Compressors & Expanders - Electric Motors - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measurement Rigs - Test Rigs - Vacuum Pumps - Control Systems - Sensors - Mechanical Engineering - Engineering - Magnetic Bearing Technology - Magnetic Bearing - Sensor Arrays - Electronical Control Systems - Compressors & Expanders - Electric Motors & HSDD - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measuring Rigs - Test Rigs - Vacuum Pumps - Mechanical Engineering - Engineering - Mecos - Magnetic Bearing Technology - Magnetic Bearings - Compressors & Expanders - Electric Motors - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measurement Rigs - Test Rigs - Vacuum Pumps - Control Systems - Sensors - Mechanical Engineering - Engineering - Magnetic Bearing Technology - Magnetic Bearing - Sensor Arrays - Electronical Control Systems - Compressors & Expanders - Electric Motors & HSDD - Cryogenic Circulators - Flywheels - Beam Shutters - Turbo Blowers - Measuring Rigs - Test Rigs - Vacuum Pumps - Mechanical Engineering - Engineering

High Speed Shutters (HSS)

Power rating:

245W at 300Hz rotational speed

Key features:

Clean room environment. Mask inspection and repair.

Scope:

Complete shutter unit

Application:

EUV semi-conductor industry

Want to learn more?

We are pleased to help you out

Contact us
mecos@mecos.com
+41 52 355 52 11