This turbo booster pump designed by our cooperation partner JTEKT Co. Ltd. of Osaka, Japan (former Koyo Seiko Co. Ltd.) produces an ultra-high vacuum and enhances flow rates in semiconductor plants. The Active Magnetic Bearing system features MECOS advanced control hardware and software allowing seamless integration of the equipment into the customer’s plant.

Technical Data
 Photo courtesy JTEKT Inc.

Speed:	24'000 rpm
Motor power:	0.8 kW